Program Co-Chairs:
- J. Alexander Liddle, NIST
- Alain Diebold, CNSE, SUNY Polytechnic Institute
- Markus Kuhn, Rigaku
- Zhiyong Ma, Intel
- Paul van der Heide, IMEC
Program Committee
- Ofer Adan, Applied Materials
- Jean-Paul Barnes, CEA-Leti
- Alan Brodie, KLA-Tencor
- Michael Current, Current Scientific
- Frank de Jong, Thermo Fisher
- Ye Feng, Lam Research
- Songhee Han, Samsung
- Ajey Jacob, University of Southern California
- Shunsuke Koshihara, Hitachi High-Tech Corporation
- Gert Leusink, TEL Technology Center, America
- JJ Lee, formerly with TSMC
- Ulrich Mantz, Philips Photonics
- Bob McDonald, formerly of Intel (Treasurer)
- Baohua Niu, TSMC
- Shinichi Ogawa, AIST
- Erik Secula, NIST
- David Seiler, NIST
- Usha Varshney, NSF
- Ehrenfried Zschech, deepXscan